For the use vacuum, special sensors, cables and other
accessories are available.5 µm
.
Vacuum: For vacuum applications,
Micro-Epsilon offers vacuum-
suitable sensors, cables and cable
feedthrough accessories.
Lateral
resolution
< 1.
Vacuum applications
The confocalDT sensors consist passive components and not
emit heat.
Light spot µm: Very small details and
the finest structures can detected
reliably due the small focal point.
±48°
Robust optical fibers for all applications
Standard fiber optics Drag-chain suitable
fiber optics
Protective hose
for mechanical stress
Robot-suitable
fiber optics
Vacuum UHV
model
Smallest light spot for high lateral resolution
The confocalDT sensors are available with different aperture angles.
Compact sensors for restricted installation spaces
The compact design with diameters from enables integration in
restricted spaces. The size the light spot remains almost constant over the
entire measuring range.5
Large measuring angle ideal for curved and structured surfaces
The confocalDT IFS sensors tolerate large measuring angle up
to 48°.
A large aperture angle with high numerical aperture (NA number)
enables small light spot (X-Y resolution) well high Z-axis
resolution, allowing the smallest details detected with high
precision. Therefore, curved and structured surfaces can detected
reliably generate stable signals. With the 90° models, the required installation depth
is again significantly reduced
