8
ø16
7. Acceptance report enclosed with delivery. 105 approx. 130 g
1)
Start measuring range measured from sensor axis
2)
Average from 512 values kHz, the mid the measuring range onto optical flat
3)
RMS noise relates mid measuring range kHz)
4)
All data constant ambient temperature (25±1 °C).30 0.2
ø12.6 1)
Resolution
static 2)
18 nm
dynamic 3)
97 nm
Linearity 4)
Displacement and distance ±0.75 ±0.
5)
Maximum measuring angle the sensor that produces usable signal reflecting surfaces.g.5 2. 12.8
Exchangeable
protective glass
ø20
.8
Clamping
range
60
77.2 12.
7)
Sensor weight without optical fiber
Confocal chromatic sensors for displacement and thickness
confocalDT IFS2406
Dimensions mm,
not scale.6
2. Measurement plane-parallel test glass.30
Min.0 thick
20
ø20
approx. 17.125 mm
Target material reflective, diffuse well transparent surfaces (e.24
Model IFS2406-2,5/VAC(003) IFS2406/90-2,5/VAC(001)
Measuring range 2. The accuracy decreases when approaching the limit values.
Sensors with axial
or
radial beam path
Submicron resolution
For one-sided thickness
measurements
For precise distance
measurements
Very small light spot
Suitable for VAC areas
VAC
2.5
Exchangeable
protective glass
6. target thickness 6)
0.5 mm
Start measuring range approx.5
±2
ø16
2.5 µm
Light spot diameter µm
Max.5 ±1.5
approx.
6)
Glass sheet with refractive index 1.125 0.85
89
±2
Clamping
range
60
79. measuring angle 5)
±16° ±16°
Numerical aperture (NA) 0. glass)
Connection
pluggable optical fiber via socket, type C240x-x (01);
standard length extension m;
bending radius: static mm, dynamic mm
Installation Clamping (mounting adapter see accessories)
Temperature range
Storage -20 +70 °C
Operation +70 °C
Shock (DIN 60068-2-27) 15g axis, 1000 shocks each
Vibration (DIN 60068-2-6) 500 axis, cycles each
Protection class (DIN 60529) IP40 (vacuum compatible)
Material Stainless steel housing, glass lenses
Weight 7)
approx.
17.5 throughout the entire measuring range.75 µm
Thickness ±1. the mid the measuring range, also thinner layers can measured
