5
approx.5 ±1.8
Clamping
range
60
77. 105 approx.5 µm
Light spot diameter µm
Max. glass)
Connection
pluggable optical fiber via socket, type C240x-x (01);
standard length extension m;
bending radius: static mm, dynamic mm
Installation Clamping (mounting adapter see accessories)
Temperature range
Storage -20 +70 °C
Operation +70 °C
Shock (DIN 60068-2-27) 15g axis, 1000 shocks each
Vibration (DIN 60068-2-6) 500 axis, cycles each
Protection class (DIN 60529) IP40 (vacuum compatible)
Material Stainless steel housing, glass lenses
Weight 7)
approx.5 throughout the entire measuring range. 130 g
1)
Start measuring range measured from sensor axis
2)
Average from 512 values kHz, the mid the measuring range onto optical flat
3)
RMS noise relates mid measuring range kHz)
4)
All data constant ambient temperature (25±1 °C).30 0.30
Min. the mid the measuring range, also thinner layers can measured.
17.24
Model IFS2406-2,5/VAC(003) IFS2406/90-2,5/VAC(001)
Measuring range 2.0 thick
20
ø20
approx. 17.8
ø16
7.5 mm
Start measuring range approx.6
2. target thickness 6)
0.
Sensors with axial
or
radial beam path
Submicron resolution
For one-sided thickness
measurements
For precise distance
measurements
Very small light spot
Suitable for VAC areas
VAC
2.
7)
Sensor weight without optical fiber
Confocal chromatic sensors for displacement and thickness
confocalDT IFS2406
Dimensions mm,
not scale.2
ø12. measuring angle 5)
±16° ±16°
Numerical aperture (NA) 0.8
Exchangeable
protective glass
ø20
.g.5
Exchangeable
protective glass
6. Acceptance report enclosed with delivery.
6)
Glass sheet with refractive index 1.5 2.2 12.75 ±0.75 µm
Thickness ±1. Measurement plane-parallel test glass.
5)
Maximum measuring angle the sensor that produces usable signal reflecting surfaces. 12. The accuracy decreases when approaching the limit values.6 1)
Resolution
static 2)
18 nm
dynamic 3)
97 nm
Linearity 4)
Displacement and distance ±0.5
±2
ø16
2.125 mm
Target material reflective, diffuse well transparent surfaces (e.125 0.85
89
±2
Clamping
range
60
79
