5
Exchangeable
protective glass
6.8
ø16
7.8
Exchangeable
protective glass
ø20
. target thickness 6)
0.8
Clamping
range
60
77. 12.6
2.5 µm
Light spot diameter µm
Max.75 µm
Thickness ±1.75 ±0.
Sensors with axial
or
radial beam path
Submicron resolution
For one-sided thickness
measurements
For precise distance
measurements
Very small light spot
Suitable for VAC areas
VAC
2. 105 approx. 17.
5)
Maximum measuring angle the sensor that produces usable signal reflecting surfaces.5 2.5 ±1.24
Model IFS2406-2,5/VAC(003) IFS2406/90-2,5/VAC(001)
Measuring range 2.125 mm
Target material reflective, diffuse well transparent surfaces (e.30 0.2
ø12. glass)
Connection
pluggable optical fiber via socket, type C240x-x (01);
standard length extension m;
bending radius: static mm, dynamic mm
Installation Clamping (mounting adapter see accessories)
Temperature range
Storage -20 +70 °C
Operation +70 °C
Shock (DIN 60068-2-27) 15g axis, 1000 shocks each
Vibration (DIN 60068-2-6) 500 axis, cycles each
Protection class (DIN 60529) IP40 (vacuum compatible)
Material Stainless steel housing, glass lenses
Weight 7)
approx. the mid the measuring range, also thinner layers can measured.
6)
Glass sheet with refractive index 1.30
Min.5
approx. 130 g
1)
Start measuring range measured from sensor axis
2)
Average from 512 values kHz, the mid the measuring range onto optical flat
3)
RMS noise relates mid measuring range kHz)
4)
All data constant ambient temperature (25±1 °C).2 12. Measurement plane-parallel test glass. measuring angle 5)
±16° ±16°
Numerical aperture (NA) 0.5
±2
ø16
2.5 mm
Start measuring range approx.g.6 1)
Resolution
static 2)
18 nm
dynamic 3)
97 nm
Linearity 4)
Displacement and distance ±0.
7)
Sensor weight without optical fiber
Confocal chromatic sensors for displacement and thickness
confocalDT IFS2406
Dimensions mm,
not scale.0 thick
20
ø20
approx.125 0. Acceptance report enclosed with delivery. The accuracy decreases when approaching the limit values.
17.85
89
±2
Clamping
range
60
79.5 throughout the entire measuring range
