75 µm
Thickness ±1.5
±2
ø16
2.8
Exchangeable
protective glass
ø20
.5 µm
Light spot diameter µm
Max.125 0.
5)
Maximum measuring angle the sensor that produces usable signal reflecting surfaces.0 thick
20
ø20
approx.8
Clamping
range
60
77. The accuracy decreases when approaching the limit values.125 mm
Target material reflective, diffuse well transparent surfaces (e. glass)
Connection
pluggable optical fiber via socket, type C240x-x (01);
standard length extension m;
bending radius: static mm, dynamic mm
Installation Clamping (mounting adapter see accessories)
Temperature range
Storage -20 +70 °C
Operation +70 °C
Shock (DIN 60068-2-27) 15g axis, 1000 shocks each
Vibration (DIN 60068-2-6) 500 axis, cycles each
Protection class (DIN 60529) IP40 (vacuum compatible)
Material Stainless steel housing, glass lenses
Weight 7)
approx.5
approx.2 12.
7)
Sensor weight without optical fiber
Confocal chromatic sensors for displacement and thickness
confocalDT IFS2406
Dimensions mm,
not scale.
17. 17.30 0. the mid the measuring range, also thinner layers can measured.5 2.5 mm
Start measuring range approx. target thickness 6)
0.2
ø12.24
Model IFS2406-2,5/VAC(003) IFS2406/90-2,5/VAC(001)
Measuring range 2. 105 approx.g. Acceptance report enclosed with delivery. Measurement plane-parallel test glass.30
Min. 12.
Sensors with axial
or
radial beam path
Submicron resolution
For one-sided thickness
measurements
For precise distance
measurements
Very small light spot
Suitable for VAC areas
VAC
2.5 ±1.5
Exchangeable
protective glass
6.75 ±0.85
89
±2
Clamping
range
60
79.6
2.
6)
Glass sheet with refractive index 1.8
ø16
7.5 throughout the entire measuring range. measuring angle 5)
±16° ±16°
Numerical aperture (NA) 0. 130 g
1)
Start measuring range measured from sensor axis
2)
Average from 512 values kHz, the mid the measuring range onto optical flat
3)
RMS noise relates mid measuring range kHz)
4)
All data constant ambient temperature (25±1 °C).6 1)
Resolution
static 2)
18 nm
dynamic 3)
97 nm
Linearity 4)
Displacement and distance ±0
