17.30
Min. the mid the measuring range, also thinner layers can measured.6
2.5 ±1.8
Exchangeable
protective glass
ø20
.6 1)
Resolution
static 2)
18 nm
dynamic 3)
97 nm
Linearity 4)
Displacement and distance ±0.2 12.75 µm
Thickness ±1.5
Exchangeable
protective glass
6.2
ø12. 130 g
1)
Start measuring range measured from sensor axis
2)
Average from 512 values kHz, the mid the measuring range onto optical flat
3)
RMS noise relates mid measuring range kHz)
4)
All data constant ambient temperature (25±1 °C).5 2.
6)
Glass sheet with refractive index 1.30 0. 105 approx. The accuracy decreases when approaching the limit values.5 throughout the entire measuring range.5 mm
Start measuring range approx.
17.75 ±0.125 mm
Target material reflective, diffuse well transparent surfaces (e. 12. measuring angle 5)
±16° ±16°
Numerical aperture (NA) 0.
Sensors with axial
or
radial beam path
Submicron resolution
For one-sided thickness
measurements
For precise distance
measurements
Very small light spot
Suitable for VAC areas
VAC
2.5
approx.5
±2
ø16
2.0 thick
20
ø20
approx.
5)
Maximum measuring angle the sensor that produces usable signal reflecting surfaces. Acceptance report enclosed with delivery.5 µm
Light spot diameter µm
Max.g.8
ø16
7.85
89
±2
Clamping
range
60
79. Measurement plane-parallel test glass. target thickness 6)
0.
7)
Sensor weight without optical fiber
Confocal chromatic sensors for displacement and thickness
confocalDT IFS2406
Dimensions mm,
not scale. glass)
Connection
pluggable optical fiber via socket, type C240x-x (01);
standard length extension m;
bending radius: static mm, dynamic mm
Installation Clamping (mounting adapter see accessories)
Temperature range
Storage -20 +70 °C
Operation +70 °C
Shock (DIN 60068-2-27) 15g axis, 1000 shocks each
Vibration (DIN 60068-2-6) 500 axis, cycles each
Protection class (DIN 60529) IP40 (vacuum compatible)
Material Stainless steel housing, glass lenses
Weight 7)
approx.8
Clamping
range
60
77.24
Model IFS2406-2,5/VAC(003) IFS2406/90-2,5/VAC(001)
Measuring range 2.125 0
