5 throughout the entire measuring range.5 µm
Light spot diameter µm
Max.6
2.75 µm
Thickness ±1.5 ±1.
6)
Glass sheet with refractive index 1.5
Exchangeable
protective glass
6.2 12. The accuracy decreases when approaching the limit values. 12.8
Exchangeable
protective glass
ø20
.85
89
±2
Clamping
range
60
79.
Sensors with axial
or
radial beam path
Submicron resolution
For one-sided thickness
measurements
For precise distance
measurements
Very small light spot
Suitable for VAC areas
VAC
2.6 1)
Resolution
static 2)
18 nm
dynamic 3)
97 nm
Linearity 4)
Displacement and distance ±0.5
approx. 17.125 mm
Target material reflective, diffuse well transparent surfaces (e. 105 approx.30
Min. Measurement plane-parallel test glass.125 0.30 0.8
ø16
7.5 2.8
Clamping
range
60
77. glass)
Connection
pluggable optical fiber via socket, type C240x-x (01);
standard length extension m;
bending radius: static mm, dynamic mm
Installation Clamping (mounting adapter see accessories)
Temperature range
Storage -20 +70 °C
Operation +70 °C
Shock (DIN 60068-2-27) 15g axis, 1000 shocks each
Vibration (DIN 60068-2-6) 500 axis, cycles each
Protection class (DIN 60529) IP40 (vacuum compatible)
Material Stainless steel housing, glass lenses
Weight 7)
approx. 130 g
1)
Start measuring range measured from sensor axis
2)
Average from 512 values kHz, the mid the measuring range onto optical flat
3)
RMS noise relates mid measuring range kHz)
4)
All data constant ambient temperature (25±1 °C). target thickness 6)
0.
17. Acceptance report enclosed with delivery.5 mm
Start measuring range approx. measuring angle 5)
±16° ±16°
Numerical aperture (NA) 0.
5)
Maximum measuring angle the sensor that produces usable signal reflecting surfaces.g.24
Model IFS2406-2,5/VAC(003) IFS2406/90-2,5/VAC(001)
Measuring range 2. the mid the measuring range, also thinner layers can measured.
7)
Sensor weight without optical fiber
Confocal chromatic sensors for displacement and thickness
confocalDT IFS2406
Dimensions mm,
not scale.2
ø12.0 thick
20
ø20
approx.75 ±0.5
±2
ø16
2
