63
6
. the mid the measuring range, also thinner layers can measured. 1)
50 mm
Resolution
static 2)
34 nm
dynamic 3)
190 190 204 nm
Linearity 4)
Displacement and distance ±1.5
ø54
Clamping
range
103.
5)
Maximum measuring angle the sensor that produces usable signal reflecting surfaces.
7)
Sensor weight without optical fiber
approx.2
ø19.22
Model IFS2405-6 IFS2405/90-6 IFS2405-10
Measuring range mm
Start measuring range approx.
6)
Glass sheet with refractive index 1.g.3 0. 260 approx. 500 g
1)
Start measuring range measured from sensor axis
2)
Average from 512 values kHz, the mid the measuring range onto optical flat
3)
RMS noise relates mid measuring range kHz)
4)
All data constant ambient temperature (25±1 °C).5 mm
Target material reflective, diffuse well transparent surfaces (e.5 ±1.
Robust universal sensors
for various applications
Submicron resolution
For one-sided thickness
measurements
For precise distance
measurements
Very small light spot
Large tilt angle
185
9.5 throughout the entire measuring range.2
ø 40
8
Clamping
range
86
ø19.5
6
ø40
24°
Clamping
range
47
0
18. measuring angle 5)
±10° ±10° ±17°
Numerical aperture (NA) 0.22 0. glass)
Connection
pluggable optical fiber via socket, standard length extension m;
bending radius: static mm; dynamic mm
Installation Clamping (mounting adapter see accessories)
Temperature range
Storage -20 +70 °C
Operation +70 °C
Shock (DIN 60068-2-27) 15g axis, 1000 shocks each
Vibration (DIN 60068-2-6) 500 axis, cycles each
Protection class (DIN 60529) IP64 (front)
Material Aluminum housing, glass lenses
Weight 7)
approx. The accuracy decreases when approaching the limit values.
50
ø38.2
155
ø30
approx.5 µm
Thickness µm
Light spot diameter µm
Max. Acceptance report enclosed with delivery.22 0.4
177
30
Confocal sensors with high precision
confocalDT IFS2405
Dimensions mm,
not scale.3
10
appr.30
Min.3 0. 41. Measurement plane-parallel test glass. target thickness 6)
0. 315 approx
