5
ø10
ø4.005 0.50
Min.
Compact sensors from ø12 mm
Submicron resolution
For one-sided thickness
measurements
For precise distance
measurements
Very small light spot
Large tilt angle
.4 µm
Light spot diameter µm
Max.9 mm
Resolution
static 1)
3 nm
dynamic 2)
6 nm
Linearity 3)
Displacement and distance ±0. g
Special features Sensor with high numerical aperture Light-intensive sensor -
1)
Average from 512 values kHz, the mid the measuring range onto optical flat
2)
RMS noise relates mid measuring range kHz)
3)
All data constant ambient temperature (25±1 °C).8
5.2
76.94
High precision sensors for displacement and thickness measurements
confocalDT IFS2407
Dimensions mm,
not scale. target thickness 5)
0.05 ±0.
1
ø12
50
Clamping
range
58.70 0. approx. approx.5 throughout the entire measuring range. Acceptance report enclosed with delivery. 5. measuring angle 4)
±48° ±48° ±30°
Numerical aperture (NA) 0.005 0. Measurement plane-parallel test glass.1(001) IFS2407-0.1
approx. the mid the measuring range, also thinner layers can measured.1 ±0.8 mm
Start measuring range approx.04 mm
Target material reflective, diffuse well transparent surfaces (e.1 ±0.26
Model IFS2407-0.05 ±0.11
ø12
0.8
Measuring range 0. The accuracy decreases when approaching the limit values.80 0.1 0.
6)
Sensor weight without optical fiber
0.g.
5)
Glass sheet with refractive index 1.2 µm
Thickness ±0.1 0.1 IFS2407-0.
4)
Maximum measuring angle the sensor that produces usable signal reflecting surfaces. glass)
Connection
pluggable optical fiber via socket, standard length m;
extension m;
bending radius: static mm; dynamic mm
Installation Clamping (mounting adapter see accessories)
Temperature range
Storage -20 +70 °C
Operation +70 °C
Shock (DIN 60068-2-27) 15g axis, 1000 shocks each
Vibration (DIN 60068-2-6) 500 axis, cycles each
Protection class (DIN 60529) IP65 (front)
Material Stainless steel housing, glass lenses
Weight 6)
approx
