1 0.
6)
Sensor weight without optical fiber
0. measuring angle 4)
±48° ±48° ±30°
Numerical aperture (NA) 0.04 mm
Target material reflective, diffuse well transparent surfaces (e.005 0.4 µm
Light spot diameter µm
Max. Acceptance report enclosed with delivery.11
ø12
0.94
High precision sensors for displacement and thickness measurements
confocalDT IFS2407
Dimensions mm,
not scale.26
Model IFS2407-0. target thickness 5)
0.1(001) IFS2407-0. the mid the measuring range, also thinner layers can measured.2
76.8
Measuring range 0.70 0.5 throughout the entire measuring range.
4)
Maximum measuring angle the sensor that produces usable signal reflecting surfaces.005 0.1 ±0.1 0.80 0.2 µm
Thickness ±0. glass)
Connection
pluggable optical fiber via socket, standard length m;
extension m;
bending radius: static mm; dynamic mm
Installation Clamping (mounting adapter see accessories)
Temperature range
Storage -20 +70 °C
Operation +70 °C
Shock (DIN 60068-2-27) 15g axis, 1000 shocks each
Vibration (DIN 60068-2-6) 500 axis, cycles each
Protection class (DIN 60529) IP65 (front)
Material Stainless steel housing, glass lenses
Weight 6)
approx.8
5.1 IFS2407-0.05 ±0.50
Min.
Compact sensors from ø12 mm
Submicron resolution
For one-sided thickness
measurements
For precise distance
measurements
Very small light spot
Large tilt angle
.5
ø10
ø4.
5)
Glass sheet with refractive index 1. approx. The accuracy decreases when approaching the limit values.g.9 mm
Resolution
static 1)
3 nm
dynamic 2)
6 nm
Linearity 3)
Displacement and distance ±0.1 ±0. Measurement plane-parallel test glass. 5.
1
ø12
50
Clamping
range
58. g
Special features Sensor with high numerical aperture Light-intensive sensor -
1)
Average from 512 values kHz, the mid the measuring range onto optical flat
2)
RMS noise relates mid measuring range kHz)
3)
All data constant ambient temperature (25±1 °C). approx.8 mm
Start measuring range approx.1
approx.05 ±0
